Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337289 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Koichi Okamoto, Kazuhiro Fujita +4 more | 2025-06-24 |
| 12064739 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Koichi Okamoto, Kazuhiro Fujita +4 more | 2024-08-20 |
| 11439967 | Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Koichi Okamoto, Kazuhiro Fujita +4 more | 2022-09-13 |
| 7615118 | Substrate processing apparatus and substrate processing method | Toshio Hiroe | 2009-11-10 |