Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8957564 | Microelectromechanical system megasonic transducer | Zarem Harold, Alexander Payne, James Hunter | 2015-02-17 |
| 7938129 | Substrate processing apparatus | Hiroaki Uchida | 2011-05-10 |
| 7615118 | Substrate processing apparatus and substrate processing method | Katsuhiro Fukui | 2009-11-10 |
| 7541285 | Substrate processing apparatus and substrate processing method | Yoshitaka Abiko | 2009-06-02 |
| 7422681 | Substrate treating apparatus | Tadashi MAEGAWA, Yoshitaka Abiko, Akira Morita | 2008-09-09 |
| 7267128 | Substrate treating apparatus | Koji Hasegawa, Ichiro Mitsuyoshi, Yoshihiro Nishina | 2007-09-11 |
| 7243911 | Substrate treating apparatus | Yoshitaka Abiko, Tomonori Kojimaru, Keiji MAGARA, Koji Hasegawa | 2007-07-17 |
| 5656088 | Apparatus for dipping substrates in processing fluid | Kenji Sugimoto, Tadashi MAEGAWA, Akihiko Hidaka, Hideki Hayashi | 1997-08-12 |
| 5191908 | Dipping type surface treatment apparatus | Kenji Sugimoto | 1993-03-09 |