Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043468 | Apparatus for and method of processing substrate | Atsushi Osawa | 2011-10-25 |
| 7541285 | Substrate processing apparatus and substrate processing method | Toshio Hiroe | 2009-06-02 |
| 7422681 | Substrate treating apparatus | Toshio Hiroe, Tadashi MAEGAWA, Akira Morita | 2008-09-09 |
| 7243911 | Substrate treating apparatus | Tomonori Kojimaru, Keiji MAGARA, Toshio Hiroe, Koji Hasegawa | 2007-07-17 |