Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Kazunori Fujikawa, Tomomasa ISHIDA, Ayumi HIGUCHI, Naozumi Fujiwara +2 more | 2020-05-12 |
| 9455134 | Substrate processing method | Masahiro Kimura, Tetsuya EMOTO, Manabu OKUTANI, Masayuki OTSUJI | 2016-09-27 |
| 9005703 | Substrate processing method | Masahiro Kimura, Tetsuya EMOTO, Manabu OKUTANI, Masayuki OTSUJI | 2015-04-14 |
| 8821974 | Substrate processing method | Masahiro Kimura, Tetsuya EMOTO, Manabu OKUTANI, Masayuki OTSUJI | 2014-09-02 |
| 7964042 | Substrate processing apparatus and substrate processing method | Katsuhiko Miya | 2011-06-21 |
| 7243911 | Substrate treating apparatus | Yoshitaka Abiko, Keiji MAGARA, Toshio Hiroe, Koji Hasegawa | 2007-07-17 |
| 6465765 | Fluid heating apparatus | Masakazu Katayama, Seiji Oku, Yusuke Muraoka | 2002-10-15 |