Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380562 | Substrate processing apparatus | Rei TAKEAKI, Koji Ando, Yosuke YASUTAKE | 2022-07-05 |
| 10727091 | Substrate processing apparatus | Rei TAKEAKI, Koji Ando, Yosuke YASUTAKE | 2020-07-28 |
| 10438821 | Substrate processing apparatus | Rei TAKEAKI, Koji Ando, Yosuke YASUTAKE | 2019-10-08 |
| 8608864 | Substrate treating method | Masahiro Kimura, Hiroaki Takahashi, Toyohide Hayashi | 2013-12-17 |
| 7422681 | Substrate treating apparatus | Toshio Hiroe, Yoshitaka Abiko, Akira Morita | 2008-09-09 |
| 5656088 | Apparatus for dipping substrates in processing fluid | Kenji Sugimoto, Akihiko Hidaka, Toshio Hiroe, Hideki Hayashi | 1997-08-12 |