Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293935 | Substrate processing apparatus | Hiroaki Ishii, Wataru Sakai, Yutaka IKEGAMI | 2025-05-06 |
| 11839893 | Substrate processing apparatus | Hiroaki Ishii, Wataru Sakai, Yutaka IKEGAMI | 2023-12-12 |
| 11380562 | Substrate processing apparatus | Rei TAKEAKI, Koji Ando, Tadashi MAEGAWA | 2022-07-05 |
| 10727091 | Substrate processing apparatus | Rei TAKEAKI, Koji Ando, Tadashi MAEGAWA | 2020-07-28 |
| 10438821 | Substrate processing apparatus | Rei TAKEAKI, Koji Ando, Tadashi MAEGAWA | 2019-10-08 |