Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10040102 | Substrate processing method | Jun Shibukawa, Shinji Kiyokawa, Tomohiro Kurebayashi | 2018-08-07 |
| 9624046 | Substrate processing apparatus and substrate conveying apparatus for use in the same | Ryo MURAMOTO | 2017-04-18 |
| 9570333 | Substrate treating apparatus | Hideki Shibata, Tomoyasu Furuta | 2017-02-14 |
| 9050634 | Substrate processing apparatus | Jun Shibukawa, Shinji Kiyokawa, Tomohiro Kurebayashi | 2015-06-09 |
| 9050635 | Substrate processing apparatus | Jun Shibukawa, Shinji Kiyokawa, Tomohiro Kurebayashi | 2015-06-09 |
| 8919358 | Substrate processing apparatus | Jun Shibukawa, Shinji Kiyokawa, Tomohiro Kurebayashi | 2014-12-30 |
| 8851821 | Substrate processing apparatus and substrate conveying apparatus for use in the same | Ryo MURAMOTO | 2014-10-07 |
| 8757180 | Substrate processing apparatus | — | 2014-06-24 |
| 8500915 | Substrate transporting apparatus, substrate platform shelf and substrate processing apparatus | — | 2013-08-06 |
| 8504194 | Substrate processing apparatus and substrate transport method | — | 2013-08-06 |
| 8316497 | Substrate processing apparatus | Jun Shibukawa, Shinji Kiyokawa | 2012-11-27 |
| 7878213 | Substrate processing apparatus | — | 2011-02-01 |
| 7704031 | Substrate processing apparatus | — | 2010-04-27 |
| 7267128 | Substrate treating apparatus | Toshio Hiroe, Koji Hasegawa, Yoshihiro Nishina | 2007-09-11 |
| 7134826 | Substrate transfer apparatus, substrate processing apparatus and holding table | — | 2006-11-14 |