Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10040102 | Substrate processing method | Ichiro Mitsuyoshi, Jun Shibukawa, Tomohiro Kurebayashi | 2018-08-07 |
| 9050634 | Substrate processing apparatus | Ichiro Mitsuyoshi, Jun Shibukawa, Tomohiro Kurebayashi | 2015-06-09 |
| 9050635 | Substrate processing apparatus | Ichiro Mitsuyoshi, Jun Shibukawa, Tomohiro Kurebayashi | 2015-06-09 |
| 8919358 | Substrate processing apparatus | Ichiro Mitsuyoshi, Jun Shibukawa, Tomohiro Kurebayashi | 2014-12-30 |
| 8316497 | Substrate processing apparatus | Jun Shibukawa, Ichiro Mitsuyoshi | 2012-11-27 |
| 5289263 | Apparatus for exposing periphery of an object | Nobutoshi Orgami, Takeshi Takada, Kenji Kamei | 1994-02-22 |