Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10040102 | Substrate processing method | Ichiro Mitsuyoshi, Jun Shibukawa, Shinji Kiyokawa | 2018-08-07 |
| 9050634 | Substrate processing apparatus | Ichiro Mitsuyoshi, Jun Shibukawa, Shinji Kiyokawa | 2015-06-09 |
| 9050635 | Substrate processing apparatus | Ichiro Mitsuyoshi, Jun Shibukawa, Shinji Kiyokawa | 2015-06-09 |
| 8919358 | Substrate processing apparatus | Ichiro Mitsuyoshi, Jun Shibukawa, Shinji Kiyokawa | 2014-12-30 |