Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10040102 | Substrate processing method | Ichiro Mitsuyoshi, Shinji Kiyokawa, Tomohiro Kurebayashi | 2018-08-07 |
| 9327918 | Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate | Motoyasu Hayashi, Mitsukazu Takahashi | 2016-05-03 |
| 9324602 | Substrate inverting apparatus and substrate processing apparatus | Takashi Shinohara, Hiroshi Kato | 2016-04-26 |
| 9050634 | Substrate processing apparatus | Ichiro Mitsuyoshi, Shinji Kiyokawa, Tomohiro Kurebayashi | 2015-06-09 |
| 9050635 | Substrate processing apparatus | Ichiro Mitsuyoshi, Shinji Kiyokawa, Tomohiro Kurebayashi | 2015-06-09 |
| 8919358 | Substrate processing apparatus | Ichiro Mitsuyoshi, Shinji Kiyokawa, Tomohiro Kurebayashi | 2014-12-30 |
| 8316497 | Substrate processing apparatus | Shinji Kiyokawa, Ichiro Mitsuyoshi | 2012-11-27 |