Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5430271 | Method of heat treating a substrate with standby and treatment time periods | Yoshiteru Fukutomi | 1995-07-04 |
| 5289263 | Apparatus for exposing periphery of an object | Shinji Kiyokawa, Takeshi Takada, Kenji Kamei | 1994-02-22 |
| 4838979 | Apparatus for processing substrate surface | Masami Nishida | 1989-06-13 |