Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217986 | Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2025-02-04 |
| 10290521 | Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe | Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2019-05-14 |
| 9687874 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2017-06-27 |
| 9368383 | Substrate treating apparatus with substrate reordering | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-06-14 |
| 9299596 | Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-03-29 |
| 9230834 | Substrate treating apparatus | Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-01-05 |
| 9184071 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-11-10 |
| 9174235 | Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines | Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-11-03 |
| 9165807 | Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units | Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-10-20 |
| 8985937 | Stocker apparatus and substrate treating apparatus | Hideyuki Iwata | 2015-03-24 |
| 8851008 | Parallel substrate treatment for a plurality of substrate treatment lines | Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2014-10-07 |
| 8708587 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Kenya Morinishi, Tsuyoshi Mitsuhashi, Yasuo Kawamatsu, Hiromichi Nagashima | 2014-04-29 |
| 8545118 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2013-10-01 |
| 8031324 | Substrate processing apparatus with integrated cleaning unit | Masami Ohtani | 2011-10-04 |
| 7641405 | Substrate processing apparatus with integrated top and edge cleaning unit | — | 2010-01-05 |
| 6893171 | Substrate treating apparatus | Kenji Sugimoto, Takashi Ito, Takeo Okamoto, Yukihiko Inagaki, Katsushi Yoshioka +1 more | 2005-05-17 |
| 6752543 | Substrate processing apparatus | Katsushi Yoshioka, Yukihiko Inagaki | 2004-06-22 |
| 5906469 | Apparatus and method for detecting and conveying substrates in cassette | Yoshiji Oka, Masayuki Itaba, Yasufumi Koyama, Toshiya Yuge | 1999-05-25 |
| 5792259 | Substrate processing apparatus and air supply method in substrate processing apparatus | Katsushi Yoshioka, Kenji Sugimoto | 1998-08-11 |
| 5765072 | Treating solution supplying method and substrate treating apparatus | Masami Ohtani | 1998-06-09 |
| 5677000 | Substrate spin treating method and apparatus | Katsushi Yoshioka, Tsuyoshi Mitsuhashi, Kenji Sugimoto | 1997-10-14 |
| 5639301 | Processing apparatus having parts for thermal and non-thermal treatment of substrates | Shigeru Sasada, Kaoru Aoki, Mitsumasa Kodama, Kenji Sugimoto, Hidekazu Inoue | 1997-06-17 |
| 5430271 | Method of heat treating a substrate with standby and treatment time periods | Nobutoshi Orgami | 1995-07-04 |
| 5359785 | Substrate transport apparatus | Masami Ohtani, Takeo Okamoto | 1994-11-01 |
| 5322079 | Substrate holding apparatus of a simple structure for holding a rotating substrate, and a substrate processing apparatus including the substrate holding apparatus | Masami Ohtani, Yasushi Nakamura | 1994-06-21 |