Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7698107 | Managing apparatus for substrate processing system | Toru Kitamoto, Kenji Kamei, Tetsuya Hamada | 2010-04-13 |
| 7460923 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Kenji Kamei, Tetsuya Hamada | 2008-12-02 |
| 7407712 | Release film | Hirotake Matsumoto, Hitoshi Shirato | 2008-08-05 |
| 7333867 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Kenji Kamei, Tetsuya Hamada | 2008-02-19 |
| 7318081 | Band-pass filter and tracking signal processor circuit | — | 2008-01-08 |
| 7280883 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Kenji Kamei, Tetsuya Hamada | 2007-10-09 |
| 7047100 | Substrate processing system managing apparatus information of substrate processing apparatus | Toru Kitamoto, Kenji Kamei, Tetsuya Hamada | 2006-05-16 |
| 6946900 | Current output circuit | — | 2005-09-20 |
| 6114909 | Differential amplifier for correcting offsets at inputs using low capacitance capacitor | Fukuji Anzai | 2000-09-05 |
| 5867389 | Substrate processing management system with recipe copying functions | Tetsuya Hamada | 1999-02-02 |
| 5639301 | Processing apparatus having parts for thermal and non-thermal treatment of substrates | Shigeru Sasada, Kaoru Aoki, Mitsumasa Kodama, Kenji Sugimoto, Yoshiteru Fukutomi | 1997-06-17 |