Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105074 | Substrate treating method and apparatus | Osamu Tamada, Tsuyoshi Mitsuhashi, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto +5 more | 2006-09-12 |
| 6832863 | Substrate treating apparatus and method | Kenji Sugimoto, Minobu Matsunaga, Masakazu Sanada, Katsushi Yoshioka, Kaoru Aoki +4 more | 2004-12-21 |
| 6558053 | Substrate processing apparatus | Kazuhito Shigemori, Masakazu Sanada, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto +7 more | 2003-05-06 |
| 5639301 | Processing apparatus having parts for thermal and non-thermal treatment of substrates | Shigeru Sasada, Kaoru Aoki, Kenji Sugimoto, Yoshiteru Fukutomi, Hidekazu Inoue | 1997-06-17 |