Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134610 | Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate | Tadashi Miyagi, Masashi Kanaoka, Shuichi Yasuda, Masakazu Sanada | 2018-11-20 |
| 9687886 | Substrate processing apparatus | Tomohiro Goto, Masakazu Sanada, Osamu Tamada, Shuichi Yasuda | 2017-06-27 |
| 9477162 | Substrate processing method | Koji Kaneyama, Masashi Kanaoka, Tadashi Miyagi, Shuichi Yasuda, Tetsuya Hamada | 2016-10-25 |
| 9059221 | Substrate processing method and substrate processing apparatus | Tomohiro Goto, Masakazu Sanada, Osamu Tamada, Shuichi Yasuda | 2015-06-16 |
| 8932672 | Substrate processing apparatus | Koji Kaneyama, Masashi Kanaoka, Tadashi Miyagi, Shuichi Yasuda, Tetsuya Hamada | 2015-01-13 |
| 8894775 | Substrate processing apparatus and substrate processing method | Tadashi Miyagi, Masashi Kanaoka, Shuichi Yasuda, Masakazu Sanada | 2014-11-25 |
| 8585830 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Toru Asano +4 more | 2013-11-19 |
| 8540824 | Substrate processing method | Koji Kaneyama, Masashi Kanaoka, Tadashi Miyagi, Shuichi Yasuda | 2013-09-24 |
| 8496761 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Akihiro Hisai, Toru Asano, Hiroshi Kobayashi, Tsuyoshi Okumura +3 more | 2013-07-30 |
| 8356424 | Substrate processing method | Koji Kaneyama, Masashi Kanaoka, Tadashi Miyagi, Shuichi Yasuda | 2013-01-22 |
| 8218124 | Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form | Tadashi Miyagi, Masashi Kanaoka, Shuichi Yasuda, Masakazu Sanada | 2012-07-10 |
| 8040488 | Substrate processing apparatus | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Toru Asano +4 more | 2011-10-18 |
| 7604424 | Substrate processing apparatus | Koji Kaneyama, Akiko Harumoto, Tadashi Miyagi, Masashi Kanaoka, Shuichi Yasuda | 2009-10-20 |
| 7497633 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Shuji Shibata, Tsuyoshi Okumura, Shuichi Yasuda, Masashi Kanaoka +1 more | 2009-03-03 |
| 6645880 | Treating solution applying method | Masakazu Sanada | 2003-11-11 |
| 6558053 | Substrate processing apparatus | Masakazu Sanada, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki +7 more | 2003-05-06 |