Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5906469 | Apparatus and method for detecting and conveying substrates in cassette | Yoshiteru Fukutomi, Masayuki Itaba, Yasufumi Koyama, Toshiya Yuge | 1999-05-25 |
| 5308210 | Interface apparatus for transporting substrates between substrate processing apparatus | Masami Ohtani, Takeo Okamoto, Yoshiteru Fukutomi | 1994-05-03 |