Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5906469 | Apparatus and method for detecting and conveying substrates in cassette | Yoshiji Oka, Yoshiteru Fukutomi, Yasufumi Koyama, Toshiya Yuge | 1999-05-25 |
| 5788868 | Substrate transfer method and interface apparatus | Kazuhiro Nishimura | 1998-08-04 |
| 5376216 | Device for holding and rotating a substrate | Katsushi Yoshioka, Koji Nakagawa, Nobuyasu Hiraoka, Masafumi Takeoka | 1994-12-27 |