Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7563323 | Substrate treating apparatus | Kenji Hashinoki, Satoshi Yamamoto | 2009-07-21 |
| 7525650 | Substrate processing apparatus for performing photolithography | Masayoshi Shiga, Kenji Hashinoki | 2009-04-28 |
| 7497912 | Substrate processing apparatus | Kenji Hashinoki, Takaharu Yamada | 2009-03-03 |
| 7317961 | Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus | Kenji Hashinoki, Takaharu Yamada | 2008-01-08 |
| 7229240 | Substrate processing apparatus and substrate processing method | Kenji Hashinoki, Takaharu Yamada | 2007-06-12 |
| 7069099 | Method of transporting and processing substrates in substrate processing apparatus | Kenji Hashinoki, Takaharu Yamada | 2006-06-27 |
| 6937917 | Substrate processing apparatus, operation method thereof and program | Kazuya Akiyama, Toru Azuma | 2005-08-30 |
| 6837632 | Substrate treating apparatus | Kenji Kamei, Toru Kitamoto, Kenji Hashinoki, Satoshi Yamamoto, Toshiaki Dainin | 2005-01-04 |
| 6253118 | Substrate transport method and apparatus | — | 2001-06-26 |
| 5906469 | Apparatus and method for detecting and conveying substrates in cassette | Yoshiji Oka, Yoshiteru Fukutomi, Masayuki Itaba, Toshiya Yuge | 1999-05-25 |
| 5184313 | Conversion device for laser interferometic measuring apparatus | Akira Kuwabara | 1993-02-02 |
| 5111332 | Method of and apparatus for controlling deflection of optical beams | Akira Kuwabara, Eiichi Tamaki | 1992-05-05 |
| 5065445 | Apparatus for expanding and formatting runlength data for multiple exposure beams | Akira Kuwabara | 1991-11-12 |
| 4896169 | Laser scan recording apparatus using aperture plates to form shifted rows of beams which are modulated and converged on photosensitive material | Akira Kuwabara | 1990-01-23 |