Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308210 | Interface apparatus for transporting substrates between substrate processing apparatus | Masami Ohtani, Yoshiji Oka, Takeo Okamoto | 1994-05-03 |
| 5201653 | Substrate heat-treating apparatus | Moriyoshi Hasegawa, Yoshio Matsumura | 1993-04-13 |