Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271830 | Learned model generating method, abnormality factor estimating device, substrate processing device, abnormality factor estimating method, learning method, learning device, and learning data generating method | Naoki SAWAZAKI, Takashi Ota | 2025-04-08 |
| 9984903 | Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus | Ayumi HIGUCHI | 2018-05-29 |
| 9768042 | Substrate processing method and substrate processing apparatus | Ayumi HIGUCHI | 2017-09-19 |