Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271830 | Learned model generating method, abnormality factor estimating device, substrate processing device, abnormality factor estimating method, learning method, learning device, and learning data generating method | Asuka Wakita, Takashi Ota | 2025-04-08 |
| 11521865 | Substrate processing method and substrate processing device | Hiroki Tsujikawa, Masato Tanaka, Tsuyoshi Okumura, Atsuyasu Miura, Makoto Takaoka +4 more | 2022-12-06 |
| 10854481 | Substrate processing method and substrate processing apparatus | Shigeki Tanizawa, Nobuyuki Miyaji, Makoto Takaoka, Tsuyoshi Okumura, Atsuyasu Miura | 2020-12-01 |
| 9956594 | Substrate processing method | Atsuyasu Miura | 2018-05-01 |