Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337289 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2025-06-24 |
| 12064739 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2024-08-20 |
| 11521865 | Substrate processing method and substrate processing device | Masato Tanaka, Tsuyoshi Okumura, Atsuyasu Miura, Makoto Takaoka, Nobuyuki Miyaji +4 more | 2022-12-06 |
| 11439967 | Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2022-09-13 |
| 10786836 | Substrate processing method and substrate processing apparatus | Atsuyasu Miura, Kazuhiro Fujita, Yuya Tsuchihashi, Kenji Takemoto | 2020-09-29 |
| 10658203 | Substrate processing apparatus and processing cup cleaning method | Masahide Ikeda, Atsuyasu Miura, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-05-19 |
| 10639683 | Recovery piping cleaning method and substrate processing apparatus | Yuya Tsuchihashi, Atsuyasu Miura, Kazuhiro Fujita, Masahide Ikeda | 2020-05-05 |
| 10622225 | Substrate processing apparatus and nozzle cleaning method | Atsuyasu Miura, Masahide Ikeda, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-04-14 |
| 10290511 | Substrate treatment apparatus and substrate treatment method | Keiji Iwata, Shotaro Tsuda, Seiji ANO | 2019-05-14 |
| 10199243 | Substrate processing method and substrate processing apparatus | Kazuhiro Fujita, Atsuyasu Miura, Yuya Tsuchihashi, Akihiko TAKI | 2019-02-05 |
| 7422641 | Substrate cleaning apparatus and substrate cleaning method | Kazuo Nakajima, Masanobu Sato, Hiroaki Sugimoto, Akio Hashizume | 2008-09-09 |
| 7314529 | Substrate cleaning apparatus and substrate cleaning method | Kazuo Nakajima, Masanobu Sato, Hiroaki Sugimoto, Akio Hashizume | 2008-01-01 |