Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670529 | Substrate processing device and component inspection method for substrate processing device | — | 2023-06-06 |
| 10903091 | Substrate processing apparatus and substrate processing method | — | 2021-01-26 |
| 10835932 | Substrate processing apparatus and substrate processing method | Takayuki Nishida, Junichi Ishii | 2020-11-17 |
| 10821483 | Substrate treatment apparatus | Wataru Yano | 2020-11-03 |
| 10665479 | Substrate treatment device and substrate treatment method | — | 2020-05-26 |
| 10497581 | Substrate processing device | Takashi Ota | 2019-12-03 |
| 9899240 | Substrate treatment apparatus | Yuya AKANISHI, Kenji Kawaguchi, Manabu Yamamoto | 2018-02-20 |
| 9867123 | Wireless communication apparatus and wireless communication method | — | 2018-01-09 |
| 9364873 | Substrate treatment method and substrate treatment apparatus | Taiki HINODE, Takashi Ota | 2016-06-14 |
| 9293352 | Substrate processing method | Yuya AKANISHI | 2016-03-22 |
| 8883026 | Substrate processing method and substrate processing apparatus | Takashi Ota, Yuya AKANISHI | 2014-11-11 |
| 8883653 | Substrate treatment method and substrate treatment apparatus | — | 2014-11-11 |
| 8877653 | Substrate processing method and substrate processing apparatus | Takahiro Yamaguchi, Yuya AKANISHI, Takashi Ota | 2014-11-04 |
| 8821741 | Substrate processing method and substrate processing apparatus | Takashi Ota, Takahiro Yamaguchi, Yuya AKANISHI | 2014-09-02 |
| 8501025 | Substrate treatment apparatus and substrate treatment method | Yuya AKANISHI, Kenji Kawaguchi, Manabu Yamamoto | 2013-08-06 |
| 7959820 | Substrate processing method and substrate processing apparatus | — | 2011-06-14 |
| 7838206 | Substrate processing method and substrate processing apparatus | — | 2010-11-23 |
| 7682456 | Substrate treatment method and substrate treatment apparatus | — | 2010-03-23 |
| 7422641 | Substrate cleaning apparatus and substrate cleaning method | Kazuo Nakajima, Masanobu Sato, Hiroaki Sugimoto, Hiroki Tsujikawa | 2008-09-09 |
| 7418970 | Substrate processing apparatus for drying substrate | Hiroaki Sugimoto, Seiichiro Okuda | 2008-09-02 |
| 7314529 | Substrate cleaning apparatus and substrate cleaning method | Kazuo Nakajima, Masanobu Sato, Hiroaki Sugimoto, Hiroki Tsujikawa | 2008-01-01 |
| 4788883 | Rotor for a driving device | — | 1988-12-06 |