Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7479205 | Substrate processing apparatus | Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae, Shuichi Yasuda +2 more | 2009-01-20 |
| 7428907 | Substrate processing apparatus | Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae, Shuichi Yasuda +2 more | 2008-09-30 |
| 7418970 | Substrate processing apparatus for drying substrate | Hiroaki Sugimoto, Akio Hashizume | 2008-09-02 |
| 7267130 | Substrate processing apparatus | Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae, Shuichi Yasuda +2 more | 2007-09-11 |
| 6951221 | Substrate processing apparatus | Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae, Shuichi Yasuda +2 more | 2005-10-04 |
| 6805769 | Substrate processing apparatus | Hiroaki Sugimoto | 2004-10-19 |
| 6550988 | Substrate processing apparatus | Hiroaki Sugimoto, Takuya Kuroda | 2003-04-22 |
| 6000862 | Substrate developing method and apparatus | Kenji Sugimoto | 1999-12-14 |
| 5788773 | Substrate spin treating method and apparatus | Kenji Sugimoto, Hiroshi Yoshii | 1998-08-04 |
| 5762709 | Substrate spin coating apparatus | Kenji Sugimoto, Katsushi Yoshioka, Tsuyoshi Mitsuhashi | 1998-06-09 |