Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881403 | Substrate processing method and substrate processing apparatus | Ayumi HIGUCHI | 2024-01-23 |
| 11410853 | Substrate processing method and substrate processing device | Ayumi HIGUCHI | 2022-08-09 |
| 11145516 | Substrate processing method and substrate processing apparatus | Ayumi HIGUCHI | 2021-10-12 |
| 10892177 | Substrate processing method and substrate processing apparatus | Akihisa IWASAKI | 2021-01-12 |
| 9899240 | Substrate treatment apparatus | Akio Hashizume, Kenji Kawaguchi, Manabu Yamamoto | 2018-02-20 |
| 9293352 | Substrate processing method | Akio Hashizume | 2016-03-22 |
| 8883026 | Substrate processing method and substrate processing apparatus | Takashi Ota, Akio Hashizume | 2014-11-11 |
| 8877653 | Substrate processing method and substrate processing apparatus | Takahiro Yamaguchi, Akio Hashizume, Takashi Ota | 2014-11-04 |
| 8821741 | Substrate processing method and substrate processing apparatus | Takashi Ota, Akio Hashizume, Takahiro Yamaguchi | 2014-09-02 |
| 8501025 | Substrate treatment apparatus and substrate treatment method | Akio Hashizume, Kenji Kawaguchi, Manabu Yamamoto | 2013-08-06 |