Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337289 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2025-06-24 |
| 12064739 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2024-08-20 |
| 11521865 | Substrate processing method and substrate processing device | Hiroki Tsujikawa, Masato Tanaka, Tsuyoshi Okumura, Makoto Takaoka, Nobuyuki Miyaji +4 more | 2022-12-06 |
| 11439967 | Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2022-09-13 |
| 10854481 | Substrate processing method and substrate processing apparatus | Shigeki Tanizawa, Nobuyuki Miyaji, Makoto Takaoka, Naoki SAWAZAKI, Tsuyoshi Okumura | 2020-12-01 |
| 10786836 | Substrate processing method and substrate processing apparatus | Kazuhiro Fujita, Hiroki Tsujikawa, Yuya Tsuchihashi, Kenji Takemoto | 2020-09-29 |
| 10658203 | Substrate processing apparatus and processing cup cleaning method | Hiroki Tsujikawa, Masahide Ikeda, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-05-19 |
| 10639683 | Recovery piping cleaning method and substrate processing apparatus | Yuya Tsuchihashi, Hiroki Tsujikawa, Kazuhiro Fujita, Masahide Ikeda | 2020-05-05 |
| 10622225 | Substrate processing apparatus and nozzle cleaning method | Masahide Ikeda, Hiroki Tsujikawa, Kazuhiro Fujita, Yuya Tsuchihashi | 2020-04-14 |
| 10199243 | Substrate processing method and substrate processing apparatus | Kazuhiro Fujita, Hiroki Tsujikawa, Yuya Tsuchihashi, Akihiko TAKI | 2019-02-05 |
| 10186435 | Chemical liquid preparation method of preparing a chemical liquid for substrate processing, chemical liquid preparation unit preparing a chemical liquid for substrate processing, and substrate processing system | Hidekazu ISHIKAWA | 2019-01-22 |
| 9956594 | Substrate processing method | Naoki SAWAZAKI | 2018-05-01 |
| 9687887 | Substrate processing apparatus | — | 2017-06-27 |
| 9050616 | Substrate treatment apparatus and substrate treatment method | Hiroaki Ishii | 2015-06-09 |