Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521865 | Substrate processing method and substrate processing device | Hiroki Tsujikawa, Masato Tanaka, Tsuyoshi Okumura, Atsuyasu Miura, Makoto Takaoka +4 more | 2022-12-06 |
| 10854481 | Substrate processing method and substrate processing apparatus | Shigeki Tanizawa, Makoto Takaoka, Naoki SAWAZAKI, Tsuyoshi Okumura, Atsuyasu Miura | 2020-12-01 |