Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355872 | Substrate treatment apparatus and substrate treatment method | Takayoshi Tanaka, Takahiro Yamaguchi | 2016-05-31 |
| 8888925 | Nozzle, substrate processing apparatus, and substrate processing method | Masanobu Sato, Hiroyuki Yashiki, Takayoshi Tanaka, Ayumi HIGUCHI, Rei TAKEAKI | 2014-11-18 |