Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840083 | Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe | Ayumi HIGUCHI | 2020-11-17 |
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Kazunori Fujikawa, Tomonori Kojimaru, Tomomasa ISHIDA, Ayumi HIGUCHI +2 more | 2020-05-12 |