Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755951 | Substrate processing apparatus and substrate processing method | Kenji IZUMOTO, Kenji Kobayashi, Kazuhide Saito, Akihisa IWASAKI | 2020-08-25 |
| 10655488 | Gas turbine transition seal with hole through seal plate in groove of nozzle | Yasuhiro Horiuchi, Shinichi Higuchi, Hisato Tagawa, Kenji Shingai | 2020-05-19 |
| 9997382 | Substrate processing apparatus and substrate processing method | Kenji IZUMOTO, Kenji Kobayashi, Kazuhide Saito, Akihisa IWASAKI | 2018-06-12 |
| 9230836 | Substrate treatment method | Ayumi HIGUCHI, Yoshiyuki FUJITANI, Rei TAKEAKI | 2016-01-05 |