Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315700 | Plasma processing apparatus and ceiling wall | Satoshi Itoh, Masashi Imanaka, Eiki KAMATA, Taro Ikeda, Soudai EMORI | 2025-05-27 |
| 11118265 | Film deposition method and computer program storage medium | Hitoshi Kato, Takeshi Kumagai | 2021-09-14 |
| 10704073 | Method for determining undifferentiated state of pluripotent stem cells by culture medium analysis | Kunitada HATABAYASHI, Kentaro Tomita, Shinichi GOMI, Tomoaki KURAKAZU, Yasuhiro Oshima +1 more | 2020-07-07 |
| 10636680 | Robot transport device | Takashi Shigeta, Toshihiro Kawai, Haruki Takeuchi, Yoshimasa Suda, Hisashi Gomi | 2020-04-28 |
| 10563159 | Cell-holding container and cell culture method using same | Yuya UBUKATA, Tsutomu Takano, Kenichi Kagawa, Yusuke YODA, Tomoaki KURAKAZU | 2020-02-18 |
| 10370632 | Facility for culturing pluripotent stem cells | Toshimitsu Fuji, Yoshio Kinoshita, Hajime Fujinaga, Ryoji Shiina, Atsushi Nishida | 2019-08-06 |
| 10351811 | Cell culture container | Tomoaki KURAKAZU, Yasuhiro Oshima, Yoshio Kimura, Kenichi Kagawa, Shinichi GOMI | 2019-07-16 |
| 9991097 | Plasma processing apparatus | Tomohito Komatsu, Yutaka Fujino, Jun NAKAGOMI | 2018-06-05 |
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Hitoshi Kato, Katsuyuki Hishiya, Hiroyuki Kikuchi, Shigehiro Ushikubo | 2018-04-03 |
| 8961735 | Plasma processing apparatus and microwave introduction device | Yutaka Fujino, Atsushi Ueda, Junichi Kitagawa | 2015-02-24 |
| 8642487 | Film deposition method and film deposition apparatus | Hitoshi Kato, Shigehiro Ushikubo, Tatsuya Tamura, Takeshi Kumagai, Hiroyuki Kikuchi | 2014-02-04 |
| 8183165 | Plasma processing method | Seiji Matsuyama, Toshio Nakanishi, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2012-05-22 |
| 8067809 | Semiconductor storage device including a gate insulating film with a favorable nitrogen concentration profile and method for manufacturing the same | Junichi Kitagawa, Akinobu Teramoto, Tadahiro Ohmi | 2011-11-29 |
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Toshio Nakanishi, Masaru Sasaki +4 more | 2011-09-20 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2011-03-01 |
| 7887637 | Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning | Hideyuki Noguchi, Yoshiro Kabe, Kazuhiro Isa, Masaru Sasaki | 2011-02-15 |
| 7723241 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2010-05-25 |
| 7713864 | Method of cleaning semiconductor substrate conductive layer surface | Masaru Sasaki, Shinji Ide | 2010-05-11 |
| 7662236 | Method for forming insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Toshio Nakanishi, Masaru Sasaki +1 more | 2010-02-16 |
| 7655574 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Toshio Nakanishi, Masaru Sasaki +4 more | 2010-02-02 |
| 7632758 | Process and apparatus for forming oxide film, and electronic device material | Junichi Kitagawa, Shinji Ide | 2009-12-15 |
| 7622402 | Method for forming underlying insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Toshio Nakanishi, Masaru Sasaki +4 more | 2009-11-24 |
| 7560396 | Material for electronic device and process for producing the same | Takuya Sugawara, Masaru Sasaki | 2009-07-14 |
| 7446052 | Method for forming insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Toshio Nakanishi, Masaru Sasakii +1 more | 2008-11-04 |
| 7429539 | Nitriding method of gate oxide film | Seiji Matsuyama, Takuya Sugawara, Toshio Nakanishi, Masaru Sasaki | 2008-09-30 |