Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Hitoshi Kato, Katsuyuki Hishiya, Hiroyuki Kikuchi, Shigenori Ozaki | 2018-04-03 |
| 9453280 | Film deposition apparatus, film deposition method and storage medium | Hitoshi Kato, Katsuyuki Hishiya | 2016-09-27 |
| 9062373 | Film deposition apparatus | Hitoshi Kato, Katsuyuki Hishiya | 2015-06-23 |
| 9053909 | Activated gas injector, film deposition apparatus, and film deposition method | Hitoshi Kato, Yasushi Takeuchi, Hiroyuki Kikuchi | 2015-06-09 |
| 8642487 | Film deposition method and film deposition apparatus | Hitoshi Kato, Tatsuya Tamura, Shigenori Ozaki, Takeshi Kumagai, Hiroyuki Kikuchi | 2014-02-04 |