Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10550467 | Film formation apparatus | Hiroaki Ikegawa, Hiroyuki Wada | 2020-02-04 |
| 10519550 | Film formation apparatus | Hiroaki Ikegawa, Hiroyuki Wada | 2019-12-31 |
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Hitoshi Kato, Hiroyuki Kikuchi, Shigehiro Ushikubo, Shigenori Ozaki | 2018-04-03 |
| 9702043 | Substrate processing apparatus | Hitoshi Kato | 2017-07-11 |
| 9453280 | Film deposition apparatus, film deposition method and storage medium | Hitoshi Kato, Shigehiro Ushikubo | 2016-09-27 |
| 9062373 | Film deposition apparatus | Hitoshi Kato, Shigehiro Ushikubo | 2015-06-23 |
| 9048273 | Substrate conveying container opening/closing device, lid opening/closing device and semiconductor manufacturing apparatus | Katsuhiko Oyama, Yasushi Takeuchi | 2015-06-02 |
| 8414242 | Processing apparatus and processing method | — | 2013-04-09 |
| 8231381 | Processing system for process object and thermal processing method for process object | Kiichi Takahashi | 2012-07-31 |
| 8181769 | Workpiece transfer mechanism, workpiece transfer method and workpiece processing system | Kiichi Takahashi, Haruoki Nakamura | 2012-05-22 |
| D655259 | Top plate for reactor for manufacturing semiconductor | Manabu Honma | 2012-03-06 |
| D655260 | Gas-separating plate for reactor for manufacturing semiconductor | Manabu Honma | 2012-03-06 |
| D655262 | Side wall for reactor for manufacturing semiconductor | Manabu Honma | 2012-03-06 |
| D655261 | Gas-separating plate for reactor for manufacturing semiconductor | Manabu Honma | 2012-03-06 |
| D655257 | Top plate for reactor for manufacturing semiconductor | Manabu Honma | 2012-03-06 |
| D655258 | Side wall for reactor for manufacturing semiconductor | Manabu Honma | 2012-03-06 |
| D654882 | Gas-separating plate for reactor for manufacturing semiconductor | Manabu Honma | 2012-02-28 |
| D654884 | Top plate for reactor for manufacturing semiconductor | Manabu Honma | 2012-02-28 |
| D654883 | Top plate for reactor for manufacturing semiconductor | Manabu Honma | 2012-02-28 |
| 7922485 | Vertical type heat processing apparatus and vertical type heat processing method | Hiromi Nitadori | 2011-04-12 |
| 7896648 | Vertical heat processing apparatus and heat processing method using the vertical heat processing apparatus | Hiromi Nitadori | 2011-03-01 |