Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837110 | Substrate processing apparatus and method for processing a substrate | Kaoru Sato | 2020-11-17 |
| 10549305 | Support structure for suspended injector and substrate processing apparatus using same | Yuya Sasaki, Yasushi Takeuchi | 2020-02-04 |
| 10428425 | Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium | Katsuhiko Oyama, Yasushi Takeuchi, Katsuyoshi Aikawa | 2019-10-01 |
| 10294565 | Substrate processing apparatus | Yuya Sasaki, Kosuke Takahashi | 2019-05-21 |
| 10002417 | Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus | Takeshi Kobayashi, Yuji Takabatake, Naohide Ito, Katsuaki Sugawara | 2018-06-19 |
| 9349589 | Vacuum processing apparatus and vacuum processing method | Tadashi Enomoto, Keiichi Tanaka | 2016-05-24 |
| 8979469 | Heat treatment apparatus and method of transferring substrates to the same | Terumi Kamada, Ittetsu Oikawa | 2015-03-17 |
| 8672602 | Vertical thermal processing apparatus | Satoshi Asari, Toshihiro Abe | 2014-03-18 |
| 8565911 | Thermal processing apparatus, thermal processing method, and storage medium | Yo Abe, Junya Sato, Yoshinobu Motodate | 2013-10-22 |
| 8423175 | Thermal processing apparatus, thermal processing method, and storage medium | Yo Abe, Junya Sato, Yoshinobu Motodate | 2013-04-16 |
| 8231381 | Processing system for process object and thermal processing method for process object | Katsuyuki Hishiya | 2012-07-31 |
| 8181769 | Workpiece transfer mechanism, workpiece transfer method and workpiece processing system | Katsuyuki Hishiya, Haruoki Nakamura | 2012-05-22 |
| 7905700 | Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus | Satoshi Asari, Katsuhiko Oyama | 2011-03-15 |
| 7762809 | Heat treatment apparatus | Yuichiro Sase, Izumi Sato, Kiyohiko Takahashi | 2010-07-27 |
| 6957956 | Vertical heat treating equipment | Katsuya Toba, Mitsuru Obara | 2005-10-25 |
| 5857848 | Transfer apparatus and vertical heat-processing system using the same | Hiroshi Kikuchi | 1999-01-12 |