Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230843 | Loading unit and processing system | — | 2016-01-05 |
| 8940096 | Vertical thermal processing apparatus and substrate supporter | Satoshi Asari, Izumi Satoh, Yuichiro Sase | 2015-01-27 |
| 6957956 | Vertical heat treating equipment | Kiichi Takahashi, Mitsuru Obara | 2005-10-25 |