Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8940096 | Vertical thermal processing apparatus and substrate supporter | Katsuya Toba, Izumi Satoh, Yuichiro Sase | 2015-01-27 |
| 8833298 | Film forming apparatus | Izumi Sato, Isao Shiratani, Tsuyoshi Murakami | 2014-09-16 |
| 8672602 | Vertical thermal processing apparatus | Kiichi Takahashi, Toshihiro Abe | 2014-03-18 |
| 7905700 | Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus | Kiichi Takahashi, Katsuhiko Oyama | 2011-03-15 |
| 7677858 | Vertical heat treatment system and method of transferring process objects | Katsuhiko Mihara, Hiroshi Kikuchi | 2010-03-16 |
| 7547209 | Vertical heat treatment system and automatic teaching method for transfer mechanism | Katsuhiko Mihara, Hiroshi Kikuchi | 2009-06-16 |
| 7416405 | Vertical type of thermal processing apparatus and method of using the same | Katsuhiko Mihara | 2008-08-26 |