Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428425 | Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium | Kiichi Takahashi, Yasushi Takeuchi, Katsuyoshi Aikawa | 2019-10-01 |
| 10096504 | Method for managing atmosphere in storage container | Yasushi Takeuchi, Shinji Asari | 2018-10-09 |
| 9679794 | Spacer, spacer transferring method, processing method and processing apparatus | Yasushi Takeuchi | 2017-06-13 |
| 9406537 | Cover opening/closing apparatus, thermal processing apparatus using the same, and cover opening/closing method | Yasushi Takeuchi | 2016-08-02 |
| 9368384 | Substrate conveying method, recording medium in which program is recorded for causing substrate conveying method to be executed, and substrate conveyor | Daisuke Yamagishi, Masataka Sato, Yasushi Takeuchi | 2016-06-14 |
| 9202768 | Semiconductor module | Hideo Aoki, Taku Nishiyama, Chiaki Takubo, Katsuya Sakai | 2015-12-01 |
| 9136152 | Substrate transport apparatus, substrate transport method, and recording medium | Yasushi Takeuchi | 2015-09-15 |
| 9048273 | Substrate conveying container opening/closing device, lid opening/closing device and semiconductor manufacturing apparatus | Katsuyuki Hishiya, Yasushi Takeuchi | 2015-06-02 |
| 8338287 | Semiconductor device and method for manufacturing the same | Masayuki Miura | 2012-12-25 |
| 7905700 | Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus | Satoshi Asari, Kiichi Takahashi | 2011-03-15 |
| 7205670 | Semiconductor device and manufacturing method therefor | — | 2007-04-17 |
| 7073999 | Receiving container body for object to be processed | — | 2006-07-11 |
| 6861738 | Laminated-chip semiconductor device | Mitsuyoshi Endo, Chiaki Takubo, Takashi Yamazaki, Takashi Imoto | 2005-03-01 |
| 6617678 | Semiconductor device | Takashi Yamazaki, Mitsuyoshi Endo, Chiaki Takubo, Takashi Imoto, Mikio Matsui | 2003-09-09 |
| 6429372 | Semiconductor device of surface mounting type and method for fabricating the same | Hideo Taguchi, Junichi Asada, Jun Omori, Toshikazu Mino, Naohisa Okumura +2 more | 2002-08-06 |
| 5677246 | Method of manufacturing semiconductor devices | Hideaki Maeta, Hiroshi Iwasaki, Yumiko Ohshima, Takahito Nakazawa | 1997-10-14 |