Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394656 | Mounting table and substrate processing apparatus | Hiroshi Sone, Shinji Orimoto | 2025-08-19 |
| 11085113 | Film forming method and recording medium | Hitoshi Kato, Shigehiro Miura, Hiroyuki Kikuchi | 2021-08-10 |
| 10683573 | Film forming apparatus | Hitoshi Kato, Shigehiro Miura, Hiroyuki Kikuchi | 2020-06-16 |
| 10428425 | Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium | Katsuhiko Oyama, Kiichi Takahashi, Yasushi Takeuchi | 2019-10-01 |
| 10072336 | Film forming apparatus, film forming method, and recording medium | Hitoshi Kato, Shigehiro Miura, Hiroyuki Kikuchi | 2018-09-11 |
| 9404184 | Substrate position detecting apparatus, substrate processing apparatus using substrate position detecting apparatus, and deposition apparatus | — | 2016-08-02 |
| 8854449 | Substrate position detection apparatus, film deposition apparatus equipped with the same, and substrate position detection method | Manabu Honma | 2014-10-07 |
| 8394200 | Vertical plasma processing apparatus for semiconductor process | Hiroyuki Matsuura, Toshiki Takahashi, Jun Sato, Katsutoshi Ishii | 2013-03-12 |
| 7022335 | Suppository of retaining in lower region of rectum | Seiichi Hori | 2006-04-04 |
| 6210698 | Suppository composition | Masaru Yamazaki, Soichi Itoh, Seiichi Hori, Tomoko Fujimori | 2001-04-03 |