Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479852 | Method for dry cleaning a susceptor and substrate processing apparatus | Jun Sato, Takashi Chiba | 2022-10-25 |
| 11390948 | Film forming apparatus | Masato Yonezawa, Hiroyuki Akama, Koji Yoshii | 2022-07-19 |
| 11328901 | Deposition method | Masato Yonezawa, Takehiro FUKADA, Yoshitaka Enoki, Yuji Sawada | 2022-05-10 |
| 11274372 | Film deposition apparatus | — | 2022-03-15 |
| 11131023 | Film deposition apparatus and film deposition method | Jun Sato | 2021-09-28 |
| 11118264 | Plasma processing method and plasma processing apparatus | — | 2021-09-14 |
| 11085113 | Film forming method and recording medium | Hitoshi Kato, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2021-08-10 |
| 10796902 | Film deposition method | — | 2020-10-06 |
| 10683573 | Film forming apparatus | Hitoshi Kato, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2020-06-16 |
| 10604837 | Film deposition apparatus | Hitoshi Kato | 2020-03-31 |
| 10480067 | Film deposition method | Hitoshi Kato, Masahiro Murata, Jun Sato | 2019-11-19 |
| 10385453 | Film forming apparatus | Masato Yonezawa, Hiroyuki Akama, Koji Yoshii | 2019-08-20 |
| 10358720 | Substrate processing apparatus | — | 2019-07-23 |
| 10287675 | Film deposition method | — | 2019-05-14 |
| 10217642 | Substrate processing apparatus, substrate processing method and substrate holding member | Jun Sato | 2019-02-26 |
| 10202687 | Substrate processing method and substrate processing apparatus | Jun Sato | 2019-02-12 |
| 10151031 | Method for processing a substrate and substrate processing apparatus | Hitoshi Kato, Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano | 2018-12-11 |
| 10151034 | Substrate processing method including supplying a fluorine-containing gas on a surface of a substrate | — | 2018-12-11 |
| 10103009 | Plasma processing device and operation method | Hitoshi Kato, Jun Sato, Takeshi Kobayashi, Masato Yonezawa | 2018-10-16 |
| 10072336 | Film forming apparatus, film forming method, and recording medium | Hitoshi Kato, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2018-09-11 |
| 10043639 | Substrate processing apparatus and substrate processing method | — | 2018-08-07 |
| 9865454 | Substrate processing apparatus and substrate processing method | Hitoshi Kato, Hiroyuki Kikuchi, Masato Yonezawa, Jun Sato | 2018-01-09 |
| 9865499 | Method and apparatus for gap fill using deposition and etch processes | Jun Sato, Hiroyuki Kikuchi, Masahiro Murata | 2018-01-09 |
| 9777369 | Method of depositing a film, recording medium, and film deposition apparatus | Hitoshi Kato, Masahiro Murata, Kentaro Oshimo | 2017-10-03 |
| 9714467 | Method for processing a substrate and substrate processing apparatus | Hitoshi Kato, Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano | 2017-07-25 |