Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711370 | Substrate processing apparatus and method of processing a substrate | Hitoshi Kato, Jun Sato, Hiroyuki Kikuchi | 2017-07-18 |
| 9693434 | Dimming device and illumination system using same | Kei Miura, Kiyoshi Gotou, Takeo Suzuki | 2017-06-27 |
| 9607828 | Method of depositing a silicon-containing film | Jun Sato | 2017-03-28 |
| 9601318 | Plasma processing method and plasma processing apparatus | Hitoshi Kato, Jun Sato, Toshiyuki Nakatsubo, Hiroyuki Kikuchi | 2017-03-21 |
| 9583318 | Plasma processing apparatus, plasma processing method, and recording medium | Takeshi Kobayashi, Katsuaki Sugawara, Naohide Ito | 2017-02-28 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Yohei Yamazawa, Mitsuhiro Tachibana, Hitoshi Kato +2 more | 2017-02-28 |
| 9502215 | Plasma processing apparatus and plasma processing method | Hitoshi Kato, Chishio Koshimizu, Jun Yamawaku, Yohei Yamazawa | 2016-11-22 |
| 9466483 | Film deposition apparatus and film deposition method | Hitoshi Kato | 2016-10-11 |
| 9376751 | Plasma processing device and operation method | Hitoshi Kato, Jun Sato, Takeshi Kobayashi, Masato Yonezawa | 2016-06-28 |
| 9209011 | Method of operating film deposition apparatus and film deposition apparatus | Hitoshi Kato | 2015-12-08 |
| 9129518 | Device control system, wireless control apparatus, and computer readable recording medium | Tomoaki Sasaki, Taku Haraguchi | 2015-09-08 |
| 9111747 | Film deposition apparatus, substrate processing apparatus and film deposition method | Jun Yamawaku, Chishio Koshimizu, Mitsuhiro Tachibana, Hitoshi Kato, Takeshi Kobayashi +1 more | 2015-08-18 |
| 8927440 | Film deposition apparatus and method of depositing film | Hitoshi Kato | 2015-01-06 |
| 8871654 | Film deposition apparatus, and method of depositing a film | Hitoshi Kato | 2014-10-28 |