Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664201 | Substrate holding mechanism and substrate processing apparatus | Hitoshi Kato, Takeshi Kobayashi | 2023-05-30 |
| 11136669 | Film formation apparatus | Hitoshi Kato, Takeshi Kobayashi | 2021-10-05 |
| 11118267 | Substrate processing method | Hitoshi Kato, Takeshi Kobayashi, Tomoya Hasegawa | 2021-09-14 |
| 9601318 | Plasma processing method and plasma processing apparatus | Shigehiro Miura, Hitoshi Kato, Jun Sato, Hiroyuki Kikuchi | 2017-03-21 |