Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344936 | Liquid raw material supplying method and gas supply apparatus | Hiroaki Dewa, Satoshi MIZUNAGA | 2025-07-01 |
| 11621185 | Semiconductor manufacturing apparatus and method for transferring wafer | Rintaro Takao, Hiroaki Dewa, Masayuki Kozawa | 2023-04-04 |
| 11073851 | Monitoring apparatus of raw material tank and monitoring method of raw material tank | Kenta Horigome, Shinobu Kawamorita, Yosuke Matsumoto, Kosuke Takahashi | 2021-07-27 |
| 10186422 | Substrate processing apparatus | Keiji Osada, Daisuke Morisawa | 2019-01-22 |
| 10002417 | Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus | Kiichi Takahashi, Takeshi Kobayashi, Yuji Takabatake, Katsuaki Sugawara | 2018-06-19 |
| 9828675 | Processing apparatus and processing method | Daisuke Morisawa, Keiji Osada | 2017-11-28 |
| 9583318 | Plasma processing apparatus, plasma processing method, and recording medium | Shigehiro Miura, Takeshi Kobayashi, Katsuaki Sugawara | 2017-02-28 |