Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11073851 | Monitoring apparatus of raw material tank and monitoring method of raw material tank | Kenta Horigome, Yosuke Matsumoto, Kosuke Takahashi, Naohide Ito | 2021-07-27 |
| 10550471 | Mixed gas multiple line supply system and substrate processing apparatus using same | Satoru Koike | 2020-02-04 |