Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720312 | Substrate processing apparatus | Hiromi Nitadori | 2020-07-21 |
| 10550471 | Mixed gas multiple line supply system and substrate processing apparatus using same | Shinobu Kawamorita | 2020-02-04 |
| 10429263 | Pressure measuring device and exhaust system using the same, and substrate processing apparatus | Satoshi Kikuchi, Tsuneyuki Okabe | 2019-10-01 |
| 9360390 | Pressure measuring instrument and substrate processing apparatus provided with the pressure measuring instrument | — | 2016-06-07 |
| 8158077 | Composition for detection and model for evaluation of food packaging material using the same | Mie Kanehara, Miki Yamasaki, Tomoyuki Watanabe | 2012-04-17 |