Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398830 | Piping structure and processing apparatus | Masato KADOBE | 2025-08-26 |
| 11302542 | Processing apparatus | Masato KADOBE, Shinya Nasukawa, Kazuyuki Kikuchi, Hirofumi Kaneko | 2022-04-12 |
| 10720312 | Substrate processing apparatus | Satoru Koike | 2020-07-21 |
| 10475641 | Substrate processing apparatus | Kohei Fukushima | 2019-11-12 |
| 9214371 | Thermal treatment apparatus and thermal treatment method | — | 2015-12-15 |
| 7922485 | Vertical type heat processing apparatus and vertical type heat processing method | Katsuyuki Hishiya | 2011-04-12 |
| 7896648 | Vertical heat processing apparatus and heat processing method using the vertical heat processing apparatus | Katsuyuki Hishiya | 2011-03-01 |
| 7798811 | Vertical type heat processing apparatus and vertical type heating method | Hirofumi Kaneko | 2010-09-21 |
| D525408 | Wafer conveyor arm for semiconductor manufacturing equipment | — | 2006-07-18 |