Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12281389 | Substrate processing method and substrate processing apparatus | — | 2025-04-22 |
| 12054828 | Substrate processing method and substrate processing apparatus | — | 2024-08-06 |
| 11560628 | Substrate processing method and substrate processing apparatus | — | 2023-01-24 |
| 11282721 | Vertical heat treatment apparatus | Hiroki IRIUDA | 2022-03-22 |
| 11208721 | Substrate processing apparatus | Tsuneyuki Okabe | 2021-12-28 |
| 10475641 | Substrate processing apparatus | Hiromi Nitadori | 2019-11-12 |
| 10287682 | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | Kazuyuki Kikuchi, Tsuneyuki Okabe | 2019-05-14 |
| 9970111 | Substrate processing apparatus having ground electrode | Hiroyuki Matsuura, Yutaka Motoyama, Koichi Shimada, Takeshi Ando | 2018-05-15 |
| 9789579 | Apparatus for detecting rammer tip-over | Takamasa Takeshige, Yasunori Matsubara | 2017-10-17 |
| 9776202 | Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus | Yutaka Motoyama, Keisuke Suzuki, Shingo Hishiya | 2017-10-03 |
| D786810 | Dummy wafer | Yutaka Motoyama | 2017-05-16 |
| D785576 | Dummy wafer | Yutaka Motoyama | 2017-05-02 |
| D784937 | Dummy wafer | Yutaka Motoyama | 2017-04-25 |
| 9624579 | Film forming apparatus, film forming method, and non-transitory computer-readable storage medium | — | 2017-04-18 |
| 9487859 | Operating method of vertical heat treatment apparatus, storage medium, and vertical heat treatment apparatus | Yutaka Motoyama, Keisuke Suzuki, Hiromi Takahashi | 2016-11-08 |
| 8608902 | Plasma processing apparatus | Toshiki Takahashi, Hiroyuki Matsuura, Yutaka Motoyama, Kazuya Yamamoto | 2013-12-17 |
| 8336490 | Plasma processing apparatus | Hiroyuki Matsuura, Toshiki Takahashi | 2012-12-25 |
| 7825039 | Vertical plasma processing method for forming silicon containing film | Toshiki Takahashi, Koichi Orito, Jun Sato | 2010-11-02 |
| 7758920 | Method and apparatus for forming silicon-containing insulating film | Kazuhide Hasebe, Mitsuhiro Okada, Pao-Hwa Chou, Jun Ogawa, Chaeho Kim +2 more | 2010-07-20 |
| 7462376 | CVD method for forming silicon nitride film | Hitoshi Kato, Masato Yonezawa, Junya Hiraka | 2008-12-09 |
| 7156923 | Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method | Hitoshi Kato, Atsushi Endo, Tatsuo Nishita, Takeshi Kumagai | 2007-01-02 |
| 6844273 | Precleaning method of precleaning a silicon nitride film forming system | Hitoshi Kato, Atsushi Endo, Tatsuo Nishita, Takeshi Kumagai | 2005-01-18 |