| 11532639 |
Three-dimensional semiconductor memory device |
Sangsoo Lee, Woosung Lee, Phil Ouk Nam, Junggeun Jee |
2022-12-20 |
| 10208397 |
Apparatus for depositing a thin film |
Seung-min Ryu, Sang Min Lee, HEE JONG JEONG, Ji Su Son, Jaebong Lee +2 more |
2019-02-19 |
| 10109747 |
Semiconductor memory devices and methods of fabricating the same |
Byong-Hyun Jang, Juhyung Kim, Woonkyung Lee, Jaegoo Lee, Junkyu Yang +3 more |
2018-10-23 |
| 9893082 |
Semiconductor memory device and method of fabricating the same |
Sangryol Yang, Woong Lee, SeungHyun Lim |
2018-02-13 |
| 9536897 |
Semiconductor device and method of fabricating the same |
Dongchul Yoo, Jaeyoung Ahn, Woong Lee |
2017-01-03 |
| 9478561 |
Semiconductor memory device and method of fabricating the same |
Sangryol Yang, Woong LEE, SeungHyun Lim |
2016-10-25 |
| 9130054 |
Semiconductor memory devices and methods of fabricating the same |
Byong-Hyun Jang, Juhyung Kim, Woonkyung Lee, Jaegoo Lee, Junkyu Yang +3 more |
2015-09-08 |
| 8980731 |
Methods of forming a semiconductor device |
Jung Ho Kim, Sunghae Lee, Hanvit Yang, Dongwoo Kim, Daehyun Jang +5 more |
2015-03-17 |
| 8343594 |
Film formation method and apparatus for semiconductor process |
Kazuhide Hasebe, Mitsuhiro Okada, Byounghoon Lee, Pao-Hwa Chou |
2013-01-01 |
| 7959733 |
Film formation apparatus and method for semiconductor process |
Kazuhide Hasebe, Pao-Hwa Chou |
2011-06-14 |
| 7758920 |
Method and apparatus for forming silicon-containing insulating film |
Kazuhide Hasebe, Mitsuhiro Okada, Pao-Hwa Chou, Jun Ogawa, Kohei Fukushima +2 more |
2010-07-20 |
| 7462571 |
Film formation method and apparatus for semiconductor process for forming a silicon nitride film |
Kazuhide Hasebe, Mitsuhiro Okada, Pao-Hwa Chou, Jun Ogawa |
2008-12-09 |
