Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11233494 | Electronic circuit for filtering signal received from plasma chamber | Hyungjoon Kim, Je-Dong LEE, Younghoon Kwon, Myoungwoon Kim, Il-Woo Kim +2 more | 2022-01-25 |
| 10971335 | Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same | Hyungjoon Kim, Myoungwoon Kim | 2021-04-06 |
| 10208397 | Apparatus for depositing a thin film | Seung-min Ryu, Sang Min Lee, Chaeho Kim, Ji Su Son, Jaebong Lee +2 more | 2019-02-19 |