Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466476 | Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film | Jun Sato | 2016-10-11 |
| 9460913 | Film-forming method for forming silicon oxide film on tungsten film or tungsten oxide film | Jun Sato | 2016-10-04 |
| 8734901 | Film deposition method and apparatus | Keisuke Suzuki, Te ching Chang | 2014-05-27 |
| 8673725 | Multilayer sidewall spacer for seam protection of a patterned structure | David L. O'Meara, Anthony Dip, Aelan Mosden, Richard A. Conti | 2014-03-18 |
| 8664102 | Dual sidewall spacer for seam protection of a patterned structure | David L. O'Meara, Anthony Dip, Aelan Mosden, Richard A. Conti | 2014-03-04 |
| 8658247 | Film deposition method | Toshiyuki Ikeuchi, Kazuya Yamamoto, Kentaro Sera | 2014-02-25 |
| 8642486 | Thin film forming method, thin film forming apparatus, and program | Toshiyuki Ikeuchi, Kazuya Yamamoto, Kentarou SERA | 2014-02-04 |
| 8591989 | SiCN film formation method and apparatus | Kazuhide Hasebe | 2013-11-26 |
| 8563096 | Vertical film formation apparatus and method for using same | Masanobu Matsunaga, Masato Yonezawa, Masayuki Hasegawa, Kazuhide Hasebe | 2013-10-22 |
| 8383522 | Micro pattern forming method | Shigeru Nakajima, Kazuhide Hasebe, Mitsuaki Iwashita, Reiji Niino | 2013-02-26 |
| 8343594 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Mitsuhiro Okada, Chaeho Kim, Byounghoon Lee | 2013-01-01 |
| 8216648 | Film formation method and apparatus | Masanobu Matsunaga, Keisuke Suzuki, Jaehyuk Jang, Masato Yonezawa, Masayuki Hasegawa +1 more | 2012-07-10 |
| 8178448 | Film formation method and apparatus for semiconductor process | Nobutake Nodera, Masanobu Matsunaga, Kazuhide Hasebe, Koto Umezawa | 2012-05-15 |
| 8168375 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Mitsuaki Iwashita, Reiji Niino | 2012-05-01 |
| 8080290 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Nobutake Nodera, Masanobu Matsunaga, Jun Satoh | 2011-12-20 |
| 8034673 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Kentaro Kadonaga, Yamato Tonegawa, Kazuhide Hasebe, Tetsuya Shibata | 2011-10-11 |
| 8025931 | Film formation apparatus for semiconductor process and method for using the same | Kazuhide Hasebe | 2011-09-27 |
| 7989354 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Mitsuaki Iwashita, Reiji Niino | 2011-08-02 |
| 7964241 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Kota Umezawa, Kentaro Kadonaga, Hao-Hsiang Chang | 2011-06-21 |
| 7959733 | Film formation apparatus and method for semiconductor process | Kazuhide Hasebe, Chaeho Kim | 2011-06-14 |
| 7758920 | Method and apparatus for forming silicon-containing insulating film | Kazuhide Hasebe, Mitsuhiro Okada, Jun Ogawa, Chaeho Kim, Kohei Fukushima +2 more | 2010-07-20 |
| 7754622 | Patterning method utilizing SiBN and photolithography | Kazuhide Hasebe, Shigeru Nakajima, Yasushi Akasaka, Mitsuaki Iwashita, Reiji Niino | 2010-07-13 |
| 7718497 | Method for manufacturing semiconductor device | Yasushi Akasaka, Noriaki Fukiage, Yoshihiro Kato, Kazuhide Hasebe | 2010-05-18 |
| 7507676 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe | 2009-03-24 |
| 7462571 | Film formation method and apparatus for semiconductor process for forming a silicon nitride film | Kazuhide Hasebe, Mitsuhiro Okada, Chaeho Kim, Jun Ogawa | 2008-12-09 |