Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8563096 | Vertical film formation apparatus and method for using same | Pao-Hwa Chou, Masato Yonezawa, Masayuki Hasegawa, Kazuhide Hasebe | 2013-10-22 |
| 8298628 | Low temperature deposition of silicon-containing films | Liu Yang, Xinjian Lei, Bing Han, Manchao Xiao, Eugene Joseph Karwacki, Jr. +3 more | 2012-10-30 |
| 8257789 | Film formation method in vertical batch CVD apparatus | Nobutake Nodera, Kazuhide Hasebe | 2012-09-04 |
| 8216648 | Film formation method and apparatus | Keisuke Suzuki, Jaehyuk Jang, Pao-Hwa Chou, Masato Yonezawa, Masayuki Hasegawa +1 more | 2012-07-10 |
| 8178448 | Film formation method and apparatus for semiconductor process | Nobutake Nodera, Kazuhide Hasebe, Koto Umezawa, Pao-Hwa Chou | 2012-05-15 |
| 8080290 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Nobutake Nodera, Jun Satoh, Pao-Hwa Chou | 2011-12-20 |
| 8080477 | Film formation apparatus and method for using same | Nobutake Nodera, Jun Sato, Kazuhide Hasebe | 2011-12-20 |